High Voltage C-V Measurement System : CS-605A/CS-603A Capacitance measurement of devices for power electronics such as SiC, GaN, High-voltage capacitor & etc.

■ Automatic measurement on capacitances at 5kV(CS-605A)/3kV(CS-603A) with sweep

■ Test adaptors for curve tracer can be used for various device package types

■ System up with probe station for capacitance measurement on Wafer & on Chip

■ High and low temperature test in chamber with external interlock function

■Automatic measurement on capacitances at 5kV(CS-605A)/3kV(CS-603A) with sweep

■Test adaptors for curve tracer can be used for various device package types

■System up with probe station for capacitance measurement on Wafer & on Chip

■High and low temperature test in chamber with external interlock function

■ Automatic measurement on capacitances at 5kV(CS-605A)/3kV(CS-603A) with sweep

■ Test adaptors for curve tracer can be used for various device package types

■ System up with probe station for capacitance measurement on Wafer & on Chip

■ High and low temperature test in chamber with external interlock function